@inproceedings{c620af410900473d900cded6ca914d81,
title = "An Electrical Equivalent Circuit Model for RF MEMS Disk Resonators",
keywords = "Acoustic wave propagation, Disk resonator, Equivalent Circuit, MEMS, Acoustic wave propagation, Disk resonator, Equivalent Circuit, MEMS, Acoustic wave propagation, Disk resonator, Equivalent Circuit, MEMS",
author = "Timo Veijola",
year = "2007",
language = "English",
isbn = "1-4244-1342-7",
pages = "962--965",
booktitle = "2007 European Conference on Circuit Theory and Design, Sevilla, Spain, 26-30 August 2007",
}