An atomistic introduction to anisotropic etching

Research output: Contribution to journalArticleScientificpeer-review

Researchers

Research units

  • Nagoya University
  • DENSO Corporation

Details

Original languageEnglish
Pages (from-to)S1-S26
Number of pages26
JournalJournal of Micromechanics and Microengineering
Volume17
Issue number4
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

    Research areas

  • Etching, Review

ID: 3542936