Amorphous silicon optical waveguides and Bragg mirrors

A. Khanna; M. Mulot; S. Arpiainen; A. Säynätjoki; J. Ahopelto; S. Honkanen; H. Lipsanen

doi:10.1117/12.781237

Amorphous silicon optical waveguides and Bragg mirrors

A. Khanna^*, M. Mulot, S. Arpiainen, A. Säynätjoki, J. Ahopelto, S. Honkanen, H. Lipsanen

^*Corresponding author for this work

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

12 Citations (Scopus)

Abstract

We study 200 nm thick hydrogenated amorphous silicon (a-Si:H) optical strip waveguides fabricated by Plasma Enhanced Chemical Vapor Deposition (PECVD) technique over PECVD silicon oxide on top of standard silicon wafer. The layer of a-Si:H is etched by Reactive Ion Etching (RIE). The ability to deposit a-Si:H at low temperatures (~250°C) by PECVD renders it a promising material for integration of optical waveguides with microelectronics. Waveguides with width varying from 2 μm to 10 μm exhibit low loss. Material refractive index data of a-Si:H is measured by reflectometry and is used in simulations. A high refractive index contrast between a-Si:H and air allows tight optical confinement of modes. We demonstrate Bragg gratings fabricated by e-beam writing technology on top of the waveguides. The period of the grating is approximately 300 nm and the depth of the grooves is about 30 nm. The grating on top of the waveguide act as mirror.

Original language	English
Title of host publication	Silicon Photonics and Photonic Integrated Circuits
Editors	GC Righini, SK Honkanen, L Pavesi, L Vivien
Publisher	SPIE
Pages	1-9
Number of pages	9
ISBN (Print)	9780819471949
DOIs	https://doi.org/10.1117/12.781237
Publication status	Published - 2008
MoE publication type	A4 Conference publication
Event	Silicon Photonics and Photonic Integrated Circuits - Strasbourg, France Duration: 7 Apr 2008 → 10 Apr 2008

Publication series

Name	Proceedings of SPIE
Publisher	SPIE
Volume	6996
ISSN (Print)	0277-786X

Conference

Conference	Silicon Photonics and Photonic Integrated Circuits
Country/Territory	France
City	Strasbourg
Period	07/04/2008 → 10/04/2008

Keywords

Amorphous silicon
Bragg mirror
Propagation loss
Strip waveguide

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10.1117/12.781237

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Khanna, A., Mulot, M., Arpiainen, S., Säynätjoki, A., Ahopelto, J., Honkanen, S., & Lipsanen, H. (2008). Amorphous silicon optical waveguides and Bragg mirrors. In GC. Righini, SK. Honkanen, L. Pavesi, & L. Vivien (Eds.), Silicon Photonics and Photonic Integrated Circuits (pp. 1-9). Article 699605 (Proceedings of SPIE; Vol. 6996). SPIE. https://doi.org/10.1117/12.781237

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abstract = "We study 200 nm thick hydrogenated amorphous silicon (a-Si:H) optical strip waveguides fabricated by Plasma Enhanced Chemical Vapor Deposition (PECVD) technique over PECVD silicon oxide on top of standard silicon wafer. The layer of a-Si:H is etched by Reactive Ion Etching (RIE). The ability to deposit a-Si:H at low temperatures (~250°C) by PECVD renders it a promising material for integration of optical waveguides with microelectronics. Waveguides with width varying from 2 μm to 10 μm exhibit low loss. Material refractive index data of a-Si:H is measured by reflectometry and is used in simulations. A high refractive index contrast between a-Si:H and air allows tight optical confinement of modes. We demonstrate Bragg gratings fabricated by e-beam writing technology on top of the waveguides. The period of the grating is approximately 300 nm and the depth of the grooves is about 30 nm. The grating on top of the waveguide act as mirror.",

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Khanna, A, Mulot, M, Arpiainen, S, Säynätjoki, A, Ahopelto, J, Honkanen, S & Lipsanen, H 2008, Amorphous silicon optical waveguides and Bragg mirrors. in GC Righini, SK Honkanen, L Pavesi & L Vivien (eds), Silicon Photonics and Photonic Integrated Circuits., 699605, Proceedings of SPIE, vol. 6996, SPIE, pp. 1-9, Silicon Photonics and Photonic Integrated Circuits, Strasbourg, France, 07/04/2008. https://doi.org/10.1117/12.781237

Amorphous silicon optical waveguides and Bragg mirrors. / Khanna, A.; Mulot, M.; Arpiainen, S. et al.
Silicon Photonics and Photonic Integrated Circuits. ed. / GC Righini; SK Honkanen; L Pavesi; L Vivien. SPIE, 2008. p. 1-9 699605 (Proceedings of SPIE; Vol. 6996).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

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AU - Mulot, M.

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Amorphous silicon optical waveguides and Bragg mirrors

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Keywords

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