Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

Zhengjun Liu; Kari Iltanen; Nikolai Chekurov; Kestutis Grigoras; Ilkka Tittonen

doi:10.1088/0957-4484/24/17/175304

Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

Zhengjun Liu
, Kari Iltanen
, Nikolai Chekurov
, Kestutis Grigoras
, Ilkka Tittonen

Ilkka Tittonen Group

Research output: Contribution to journal › Article › Scientific › peer-review

12 Citations (Scopus)

Original language	English
Pages (from-to)	175304
Journal	Nanotechnology
Volume	24
Issue number	17
DOIs	https://doi.org/10.1088/0957-4484/24/17/175304
Publication status	Published - 2013
MoE publication type	A1 Journal article-refereed

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10.1088/0957-4484/24/17/175304

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title = "Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching",

author = "Zhengjun Liu and Kari Iltanen and Nikolai Chekurov and Kestutis Grigoras and Ilkka Tittonen",

year = "2013",

doi = "10.1088/0957-4484/24/17/175304",

language = "English",

volume = "24",

pages = "175304",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "Institute of Physics Publishing",

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TY - JOUR

T1 - Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

AU - Liu, Zhengjun

AU - Iltanen, Kari

AU - Chekurov, Nikolai

AU - Grigoras, Kestutis

AU - Tittonen, Ilkka

PY - 2013

Y1 - 2013

UR - http://iopscience.iop.org/0957-4484/24/17/175304

U2 - 10.1088/0957-4484/24/17/175304

DO - 10.1088/0957-4484/24/17/175304

M3 - Article

SN - 0957-4484

VL - 24

SP - 175304

JO - Nanotechnology

JF - Nanotechnology

IS - 17

ER -

Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

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Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

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