Aluminum oxide mask fabrication by focused ion beam implantation combined with wet etching

Zhengjun Liu, Kari Iltanen, Nikolai Chekurov, Kestutis Grigoras, Ilkka Tittonen

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)175304
JournalNanotechnology
Volume24
Issue number17
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

Equipment

OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility

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