Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Oili M. E. Ylivaara, Xuwen Liu, L. Kilpi, Jussi Lyytinen, D. Schneider, Mikko Laitinen, J. Julin, S. Ali, S. Sintonen, Maria Berdova, Eero Haimi, Timo Sajavaara, H. Ronkainen, H. Lipsanen, Jari Koskinen, Simo-Pekka Hannula, R.L. Puurunen

Research output: Contribution to journal › Article › Scientific › peer-review

159 Citations (Scopus)

Search results