Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition

Research output: Contribution to journalArticleScientificpeer-review


  1. 2D Layered Materials for Photonics

    Holmi, J., Mustonen, P., Lipsanen, H., Mackenzie, D., Junaid, M., Khayrudinov, V., Mäntynen, H. & Höglund, S.


    Project: Academy of Finland: Other research funding

ID: 31553949