AlOx surface passivation of black silicon by spatial ALD: Stability under light soaking and damp heat exposure

Ismo T. S. Heikkinen, George Koutsourakis, Sauli Virtanen, Marko Yli-Koski, Sebastian Wood, Ville Vähänissi, Emma Salmi, Fernando A. Castro, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

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