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AlOx surface passivation of black silicon by spatial ALD: Stability under light soaking and damp heat exposure
Ismo T. S. Heikkinen, George Koutsourakis, Sauli Virtanen, Marko Yli-Koski, Sebastian Wood, Ville Vähänissi, Emma Salmi, Fernando A. Castro, Hele Savin
Research output: Contribution to journal › Article › Scientific › peer-review
6
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(Scopus)
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