AlN metal-semiconductor field-effect transistors using Si-ion implantation

Hironori Okumura, Sami Suihkonen, Jori Lemettinen, Akira Uedono, Yuhao Zhang, Daniel Piedra, Tomás Palacios

Department of Electronics and Nanoengineering

Research output: Contribution to journal › Article › Scientific › peer-review

55 Citations (Scopus)

344 Downloads (Pure)

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Finished
DeFaMe: Defect related failure mechanisms in III-N devices
Suihkonen, S. (Principal investigator)
01/09/2016 → 31/08/2021
Project: Academy of Finland: Other research funding