AlN metal-semiconductor field-effect transistors using Si-ion implantation

Hironori Okumura, Sami Suihkonen, Jori Lemettinen, Akira Uedono, Yuhao Zhang, Daniel Piedra, Tomás Palacios

Research output: Contribution to journal › Article › Scientific › peer-review

57 Citations (Scopus)
345 Downloads (Pure)

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