ALE Method in Preparation and Modification of FED Phosphors - New Opportinities by a Novel Deposition Technique

L. Niinistö, A. Rajavuori, M. Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication1st European Field Emission Workshop (EURO FE), Basic Aspects and Technological Applications, Toledo, Spain, November 15-19, 1999
    Pages31
    Publication statusPublished - 1999
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ale
    • atomic layer epitaxy
    • fed
    • phosphor
    • thin film

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