ALE growth of titanium dioxide thin films

M. Ritala, M. Leskelä, E. Nykänen, P. Soininen, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication2nd International Symposium on Atomic Layer Epitaxy, Raleigh, USA, 1992
    Place of PublicationRaleigh, USA
    Publication statusPublished - 1992
    MoE publication typeA4 Article in a conference publication


    • atomic layer epitaxy (ALE)
    • thin films
    • titanium dioxide

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