ALE growth of titanium dioxide thin films

M. Ritala; M. Leskelä; E. Nykänen; P. Soininen; L. Niinistö

ALE growth of titanium dioxide thin films

M. Ritala, M. Leskelä, E. Nykänen, P. Soininen, L. Niinistö

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	2nd International Symposium on Atomic Layer Epitaxy, Raleigh, USA, 1992
Place of Publication	Raleigh, USA
Pages	H-4
Publication status	Published - 1992
MoE publication type	A4 Article in a conference publication

Keywords

atomic layer epitaxy (ALE)
thin films
titanium dioxide

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Cite this

@inproceedings{858418a9ae684037b42499c8fcc5ca9f,

title = "ALE growth of titanium dioxide thin films",

keywords = "atomic layer epitaxy (ALE), thin films, titanium dioxide, atomic layer epitaxy (ALE), thin films, titanium dioxide, atomic layer epitaxy (ALE), thin films, titanium dioxide",

author = "M. Ritala and M. Leskel{\"a} and E. Nyk{\"a}nen and P. Soininen and L. Niinist{\"o}",

year = "1992",

language = "English",

pages = "H--4",

booktitle = "2nd International Symposium on Atomic Layer Epitaxy, Raleigh, USA, 1992",

}

TY - GEN

T1 - ALE growth of titanium dioxide thin films

AU - Ritala, M.

AU - Leskelä, M.

AU - Nykänen, E.

AU - Soininen, P.

AU - Niinistö, L.

PY - 1992

Y1 - 1992

KW - atomic layer epitaxy (ALE)

KW - thin films

KW - titanium dioxide

KW - atomic layer epitaxy (ALE)

KW - thin films

KW - titanium dioxide

KW - atomic layer epitaxy (ALE)

KW - thin films

KW - titanium dioxide

M3 - Conference contribution

SP - H-4

BT - 2nd International Symposium on Atomic Layer Epitaxy, Raleigh, USA, 1992

CY - Raleigh, USA

ER -