ALE growth of AIN thisn films

K.-E. Elers, M. Ritala, M. Leskelä, L.-S. Johansson

    Research output: Working paperProfessional

    Original languageEnglish
    Pages33
    Publication statusPublished - 1996
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameAbstracts of 3rd Baltic ALE Symposium, Helsinki 1996

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