ALD of WO3 thin films on Si(100) surfaces from W(CO)6 and O3 precursors

Jari Malm, Matti Putkonen, Maarit Karppinen

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2009
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameBALD 2009 -konferenssi, Uppsala 15.-16.6.2009

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