ALD for binary and ternary lead oxides

Jenni Harjuoja, Matti Putkonen, Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationBaltic Conference on Atomic Layer Deposition 2006, Oslo, 19.-20.6.2006
    Pages30
    Publication statusPublished - 2006
    MoE publication typeA4 Article in a conference publication

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