ALD for amino-functionalization of silicon surfaces using aminoalkoxysilanes and water

Jari Malm, Matti Putkonen, Maarit Karppinen

Research output: Working paper › Professional

Original language	English
Publication status	Published - 2009
MoE publication type	D4 Published development or research report or study

Name	ALD 2009 -konferenssi, Portola Hotel & Spa, Monterey, CA, USA, 19.-22.7.2009

Cite this

@techreport{6463a82b56f24c9e831f5fab7b3d094e,

title = "ALD for amino-functionalization of silicon surfaces using aminoalkoxysilanes and water",

author = "Jari Malm and Matti Putkonen and Maarit Karppinen",

year = "2009",

language = "English",

series = "ALD 2009 -konferenssi, Portola Hotel & Spa, Monterey, CA, USA, 19.-22.7.2009",

type = "WorkingPaper",

}

TY - UNPB

T1 - ALD for amino-functionalization of silicon surfaces using aminoalkoxysilanes and water

AU - Malm, Jari

AU - Putkonen, Matti

AU - Karppinen, Maarit

PY - 2009

Y1 - 2009

M3 - Working paper

T3 - ALD 2009 -konferenssi, Portola Hotel & Spa, Monterey, CA, USA, 19.-22.7.2009

BT - ALD for amino-functionalization of silicon surfaces using aminoalkoxysilanes and water

ER -