ALD coating at lower temperature for polymers and carbon nanotube based transistors

K. Grigoras

ALD coating at lower temperature for polymers and carbon nanotube based transistors

K. Grigoras

Department of Chemistry and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	IMAPS Nordic Conference 2011, Espoo, 5 June 2011 - 8 June 2011
Pages	6-11
Publication status	Published - 2011
MoE publication type	A4 Conference publication

Keywords

Atomic layer deposition
Carbon nanotube
Coating
Field effect transistor
Porous membrane

Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical Engineering
Facility/equipment: Facility

Cite this

@inproceedings{2572b599095444d29d8e0345ebf5a7e2,

title = "ALD coating at lower temperature for polymers and carbon nanotube based transistors",

keywords = "Atomic layer deposition, Carbon nanotube, Coating, Field effect transistor, Porous membrane, Atomic layer deposition, Carbon nanotube, Coating, Field effect transistor, Porous membrane, Atomic layer deposition, Carbon nanotube, Coating, Field effect transistor, Porous membrane",

author = "K. Grigoras",

year = "2011",

language = "English",

isbn = "978-1-61839-112-4",

pages = "6--11",

booktitle = "IMAPS Nordic Conference 2011, Espoo, 5 June 2011 - 8 June 2011",

}

TY - GEN

T1 - ALD coating at lower temperature for polymers and carbon nanotube based transistors

AU - Grigoras, K.

PY - 2011

Y1 - 2011

KW - Atomic layer deposition

KW - Carbon nanotube

KW - Coating

KW - Field effect transistor

KW - Porous membrane

KW - Atomic layer deposition

KW - Carbon nanotube

KW - Coating

KW - Field effect transistor

KW - Porous membrane

KW - Atomic layer deposition

KW - Carbon nanotube

KW - Coating

KW - Field effect transistor

KW - Porous membrane

M3 - Conference article in proceedings

SN - 978-1-61839-112-4

SP - 6

EP - 11

BT - IMAPS Nordic Conference 2011, Espoo, 5 June 2011 - 8 June 2011

ER -

ALD coating at lower temperature for polymers and carbon nanotube based transistors

Keywords

Equipment

Raw Materials Research Infrastructure

Cite this