ALD Applications beyond Outside IC Technology - Existing and Emerging Possibilities

Matti Putkonen

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)143-155
    JournalECS Transactions
    Volume25
    Issue number4
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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