Aggregation Kinetics of Thermal Double Donors in Silicon

Y.-J. Lee, Juhani von Boehm, M. Pesola, R.M. Nieminen

Research output: Contribution to journalArticleScientificpeer-review

9 Downloads (Pure)


A general kinetic model based on accurate density-functional-theoretic total-energy calculations is introduced to describe the aggregation kinetics of oxygen-related thermal double donors (TDD's) in silicon. The calculated kinetics, which incorporates the reactions of associations, dissociations, and isomerizations of all relevant oxygen complexes, is in agreement with experimental annealing studies. The aggregation of TDD's takes place through parallel-consecutive reactions where both mobile oxygen dimers and fast migrating chainlike TDD's capture interstitial oxygen atoms.
Original languageEnglish
Pages (from-to)3060-3063
JournalPhysical Review Letters
Issue number14
Publication statusPublished - 2001
MoE publication typeA1 Journal article-refereed


  • Thermal Double Donors


Dive into the research topics of 'Aggregation Kinetics of Thermal Double Donors in Silicon'. Together they form a unique fingerprint.

Cite this