AFM study of titanium dioxide thin films grown by ALE

M. Ritala; M. Leskelä; E. Nykänen; P. Soininen; L. Niinistö

AFM study of titanium dioxide thin films grown by ALE

M. Ritala, M. Leskelä, E. Nykänen, P. Soininen, L. Niinistö

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	12th International Vacuum Congress and 8th International Conference on Solid Surfaces, Haag, Hollanti, 1992
Publication status	Published - 1992
MoE publication type	A4 Article in a conference publication

Keywords

atomic force microscope (AFM)
atomic layer epitaxy (ALE)
thin films
titanium dioxide

Cite this

@inproceedings{4866d07ab9c84c09ab1fb4065ed06c96,

title = "AFM study of titanium dioxide thin films grown by ALE",

keywords = "atomic force microscope (AFM), atomic layer epitaxy (ALE), thin films, titanium dioxide, atomic force microscope (AFM), atomic layer epitaxy (ALE), thin films, titanium dioxide, atomic force microscope (AFM), atomic layer epitaxy (ALE), thin films, titanium dioxide",

author = "M. Ritala and M. Leskel{\"a} and E. Nyk{\"a}nen and P. Soininen and L. Niinist{\"o}",

year = "1992",

language = "English",

booktitle = "12th International Vacuum Congress and 8th International Conference on Solid Surfaces, Haag, Hollanti, 1992",

}

TY - GEN

T1 - AFM study of titanium dioxide thin films grown by ALE

AU - Ritala, M.

AU - Leskelä, M.

AU - Nykänen, E.

AU - Soininen, P.

AU - Niinistö, L.

PY - 1992

Y1 - 1992

KW - atomic force microscope (AFM)

KW - atomic layer epitaxy (ALE)

KW - thin films

KW - titanium dioxide

KW - atomic force microscope (AFM)

KW - atomic layer epitaxy (ALE)

KW - thin films

KW - titanium dioxide

KW - atomic force microscope (AFM)

KW - atomic layer epitaxy (ALE)

KW - thin films

KW - titanium dioxide

M3 - Conference contribution

BT - 12th International Vacuum Congress and 8th International Conference on Solid Surfaces, Haag, Hollanti, 1992

ER -