@inproceedings{4866d07ab9c84c09ab1fb4065ed06c96,
title = "AFM study of titanium dioxide thin films grown by ALE",
keywords = "atomic force microscope (AFM), atomic layer epitaxy (ALE), thin films, titanium dioxide, atomic force microscope (AFM), atomic layer epitaxy (ALE), thin films, titanium dioxide, atomic force microscope (AFM), atomic layer epitaxy (ALE), thin films, titanium dioxide",
author = "M. Ritala and M. Leskel{\"a} and E. Nyk{\"a}nen and P. Soininen and L. Niinist{\"o}",
year = "1992",
language = "English",
booktitle = "12th International Vacuum Congress and 8th International Conference on Solid Surfaces, Haag, Hollanti, 1992",
}