@inproceedings{018cfc9e00504f2dadb86491ca53998a,
title = "AFM, SEM, XPS and RHEED investigation of TiO2 thin films grown by atomic layer deposition",
keywords = "AFM, atomic layer deposition, RHEED, SEM, thin film, titanium oxide, XPS, AFM, atomic layer deposition, RHEED, SEM, thin film, titanium oxide, XPS, AFM, atomic layer deposition, RHEED, SEM, thin film, titanium oxide, XPS",
author = "V. Sammelselg and A. Rosental and A. Tarre and L. Niinist{\"o} and L.-S. Johansson and T. Uustare",
year = "1997",
language = "English",
pages = "17",
editor = "A. Rosental",
booktitle = "The 4th Baltic Symposium on Atomic Layer Epitaxy, Tartto, Viro, 10.-11.10.1997",
}