AFM, SEM, XPS and RHEED investigation of TiO2 thin films grown by atomic layer deposition

V. Sammelselg, A. Rosental, A. Tarre, L. Niinistö, L.-S. Johansson, T. Uustare

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe 4th Baltic Symposium on Atomic Layer Epitaxy, Tartto, Viro, 10.-11.10.1997
    EditorsA. Rosental
    Place of PublicationTartto
    Publication statusPublished - 1997
    MoE publication typeA4 Article in a conference publication


    • AFM
    • atomic layer deposition
    • RHEED
    • SEM
    • thin film
    • titanium oxide
    • XPS

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