@techreport{6bfcb73fcf8e4eecb0a459d9be7bbe20,
title = "AES and XPS study of the structure of ALE-deposited SnOx thin films",
keywords = "aes, ale, Auger, esca, thin film, tin oxide, xps, aes, ale, Auger, esca, thin film, tin oxide, xps, aes, ale, Auger, esca, thin film, tin oxide, xps",
author = "E.B. Varhegyi and F. Reti and M. Utriainen and V.K. Josepovits and I.V. Perczel and G. Kiss and L. Niinist{\"o} and P. Deak",
year = "1996",
language = "English",
series = "ECASIA 95, 6th European Conference on Applications of Surface and Interface Analysis, Montreux, Sveitsi, 9.-13.10.1995",
publisher = "Wiley",
pages = "85--88",
type = "WorkingPaper",
institution = "Wiley",
}