AES and XPS study of the structure of ALE-deposited SnOx thin films

E.B. Varhegyi, F. Reti, M. Utriainen, V.K. Josepovits, I.V. Perczel, G. Kiss, L. Niinistö, P. Deak

    Research output: Working paperProfessional

    Original languageEnglish
    Pages85-88
    Publication statusPublished - 1996
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameECASIA 95, 6th European Conference on Applications of Surface and Interface Analysis, Montreux, Sveitsi, 9.-13.10.1995
    PublisherWiley

    Keywords

    • aes
    • ale
    • Auger
    • esca
    • thin film
    • tin oxide
    • xps

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