Advances in metallization of organically modified ceramics

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Researchers

Research units

  • University of Helsinki

Abstract

Organically modified ceramic polymers (ORMOCERs) have recently attracted interest in microfluidic applications thanks to their good biocompatibility and optical transparency. In many applications, metallization is required, but adhesion of metals on polymers and bonding over metal films are major challenges for microfabrication. In this study, we developed case-specific processes for Al, Ag, Au and Pt that enable stable metallization on top of a commercial ORMOCER material, Ormocomp, and also facilitate Ormocomp-Ormocomp bonding and thus fabrication of fully enclosed micro devices with embedded metal elements.

Details

Original languageEnglish
Title of host publicationMicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Publication statusPublished - 2015
MoE publication typeA4 Article in a conference publication
EventInternational Conference on Miniaturized Systems for Chemistry and Life Sciences - Gyeongju, Korea, Republic of
Duration: 25 Oct 201529 Oct 2015
Conference number: 19

Publication series

Name
ISSN (Print)1556-5904

Conference

ConferenceInternational Conference on Miniaturized Systems for Chemistry and Life Sciences
Abbreviated titleMicroTAS
CountryKorea, Republic of
CityGyeongju
Period25/10/201529/10/2015

ID: 1467178