Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD

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@article{0a5c939699334036b762b72bddf6790e,

title = "Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD",

author = "E. Kessels and Matti Putkonen",

year = "2011",

doi = "10.1557/mrs.2011.239",

language = "English",

volume = "36",

pages = "907--911",

journal = "MRS Bulletin",

issn = "0883-7694",

publisher = "Springer",

number = "11",

}