Advanced process technologies: Plasma, direct-write, atmospheric pressure, and roll-to-roll ALD

E. Kessels, Matti Putkonen

    Research output: Contribution to journalArticleScientificpeer-review

    56 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)907-911
    JournalMRS Bulletin
    Volume36
    Issue number11
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

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