Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials,

Lauri Niinistö, Jani Päiväsaari, Jaakko Niinistö, Matti Putkonen, Minna Nieminen

    Research output: Contribution to journalArticleScientificpeer-review

    307 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1443-1452
    JournalPhysica Status Solidi A
    Volume201
    Publication statusPublished - 2004
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer deposition
    • oxides
    • thin films

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