Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectris

Lauri Niinistö, Minna Nieminen, Jaakko Niinistö, Matti Putkonen, Jani Päiväsaari

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationE-MRS 2003 Fall Meeting, Varsova, Puola
    Place of PublicationVarsova, Puola
    PublisherEuropean Materials Research Society
    Pages61
    Publication statusPublished - 2003
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ALD
    • atomic layer deposition
    • high-k dielectrics
    • thin films

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