Original language | English |
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Pages (from-to) | 3385-3390 |
Journal | Journal of Materials Chemistry |
Volume | 18 |
Issue number | 28 |
Publication status | Published - 2008 |
MoE publication type | A1 Journal article-refereed |
Advanced cyclopentadienyl precursors for atomic layer deposition of ZrO2 thin films
Jaakko Niinistö, Kaupo Kukli, Aile Tamm, Matti Putkonen, Charles L. Dezelah IV, Lauri Niinistö, Jun Lu, Fuquan Song, Paul Williams, Peter N. Heys, Mikko Ritala, Markku Leskelä
Research output: Contribution to journal › Article › Scientific › peer-review
41
Citations
(Scopus)