Advanced cyclopentadienyl precursors for atomic layer deposition of ZrO2 thin films

Jaakko Niinistö, Kaupo Kukli, Aile Tamm, Matti Putkonen, Charles L. Dezelah IV, Lauri Niinistö, Jun Lu, Fuquan Song, Paul Williams, Peter N. Heys, Mikko Ritala, Markku Leskelä

    Research output: Contribution to journalArticleScientificpeer-review

    41 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)3385-3390
    JournalJournal of Materials Chemistry
    Volume18
    Issue number28
    Publication statusPublished - 2008
    MoE publication typeA1 Journal article-refereed

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