@article{77b66607137e425096a8a5abdac43493,
title = "Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si",
keywords = "adsorption, clusters, etching, metal impurities, surface morphology, adsorption, clusters, etching, metal impurities, surface morphology, adsorption, clusters, etching, metal impurities, surface morphology",
author = "Teemu Hynninen and Foster, {Adam S.} and Gos{\'a}lvez, {Miguel A.} and Kazuo Sato and Nieminen, {Risto M.}",
year = "2008",
doi = "10.1088/0953-8984/20/48/485005",
language = "English",
volume = "20",
journal = "Journal of physics: Condensed matter",
issn = "0953-8984",
publisher = "Institute of Physics Publishing",
number = "48",
}