Original language | English |
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Article number | 01A102 |
Pages (from-to) | 1-5 |
Number of pages | 5 |
Journal | JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A |
Volume | 32 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2014 |
MoE publication type | A1 Journal article-refereed |
Keywords
- adhesion
- atomic layer deposition
- failure analysis
- microelectromechanical structures and systems (MEMS)
- reliability testing methods
Equipment
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Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical EngineeringFacility/equipment: Facility