Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres

Jussi Lyytinen, Maria Berdova, Sami Franssila, Jari Koskinen

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
362 Downloads (Pure)
Original languageEnglish
Article number01A102
Pages (from-to)1-5
Number of pages5
JournalJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Volume32
Issue number1
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

Keywords

  • adhesion
  • atomic layer deposition
  • failure analysis
  • microelectromechanical structures and systems (MEMS)
  • reliability testing methods

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