Adaptive control for multistage diffusion processes in semiconductors industry (in Russian)

Märt Puusepp, Robert Tenno

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)36-37
    JournalElectronic Industry
    Issue number1
    Publication statusPublished - 1988
    MoE publication typeA1 Journal article-refereed

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