| Original language | English |
|---|---|
| Pages (from-to) | 36-37 |
| Journal | Electronic Industry |
| Issue number | 1 |
| Publication status | Published - 1988 |
| MoE publication type | A1 Journal article-refereed |
Adaptive control for multistage diffusion processes in semiconductors industry (in Russian)
Märt Puusepp, Robert Tenno
Research output: Contribution to journal › Article › Scientific › peer-review