Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels

T. Veijola

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe 4th International Conference on Modeling and Simulation of Microsystems, 19-21.3.2001, South Carolina, USA
    Place of PublicationUSA
    Pages96-99
    Publication statusPublished - 2001
    MoE publication typeA4 Article in a conference publication

    Keywords

    • acoustic impedance
    • gas flow in microstructures
    • gas flow in rectangular channels
    • MEMS
    • oscillating gas flow
    • slip flow

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