Achieving consistency of Young’s modulus determination from nanoscale deformation of low-k films

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@article{5d66aa3dce954ca4a253a2a2aeffa3ab,

title = "Achieving consistency of Young{\textquoteright}s modulus determination from nanoscale deformation of low-k films",

author = "S. Nagao and M. Fujikane and N. Tymiak and R. Nowak",

year = "2009",

doi = "10.1063/1.3117526",

language = "English",

volume = "105",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "10",

}

TY - JOUR

T1 - Achieving consistency of Young’s modulus determination from nanoscale deformation of low-k films

AU - Nagao, S.

AU - Fujikane, M.

AU - Tymiak, N.

AU - Nowak, R.

PY - 2009

Y1 - 2009

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U2 - 10.1063/1.3117526

DO - 10.1063/1.3117526

M3 - Article

SN - 0021-8979

VL - 105

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 10

M1 - 106104

ER -