Achieving consistency of Young’s modulus determination from nanoscale deformation of low-k films

S. Nagao, M. Fujikane, N. Tymiak, R. Nowak

    Research output: Contribution to journalArticle

    13 Citations (Scopus)
    Original languageEnglish
    Article number106104
    Number of pages3
    JournalJournal of Applied Physics
    Volume105
    Issue number10
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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