Achieving consistency of Young’s modulus determination from nanoscale deformation of low-k films

S. Nagao, M. Fujikane, N. Tymiak, R. Nowak

    Research output: Contribution to journalArticleScientificpeer-review

    14 Citations (Scopus)
    Original languageEnglish
    Article number106104
    Number of pages3
    JournalJournal of Applied Physics
    Volume105
    Issue number10
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

    Cite this