Original language | English |
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Article number | 106104 |
Number of pages | 3 |
Journal | Journal of Applied Physics |
Volume | 105 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2009 |
MoE publication type | A1 Journal article-refereed |
Achieving consistency of Young’s modulus determination from nanoscale deformation of low-k films
S. Nagao, M. Fujikane, N. Tymiak, R. Nowak
Research output: Contribution to journal › Article › Scientific › peer-review
14
Citations
(Scopus)