Accelerometer Model in APLAC

T. Veijola

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationEspoo
    Pages55
    Publication statusPublished - 1994
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameCircuit Theory Laboratory Report Series
    PublisherHelsinki University of Technology, Circuit Theory Laboratory
    No.CT-18
    ISSN (Print)0784-5979

    Keywords

    • Accelerometer model
    • APLAC
    • MEMS
    • Squeezed-film effect

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