@article{3c7f46f7c8c4495ba04231691ffb74aa,
title = "A simple model for quantifying the degree of layer-by-layer growth in low energy ion deposition of thin films",
keywords = "layer-by-layer growth, low energy ion deposition, modelling, layer-by-layer growth, low energy ion deposition, modelling, layer-by-layer growth, low energy ion deposition, modelling",
author = "T. Huhtam{\"a}ki and M.O. Jahma and I.T. Koponen",
year = "2007",
doi = "10.1016/j.nimb.2007.08.073",
language = "English",
volume = "264",
pages = "55--60",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",
number = "1",
}