A simple model for quantifying the degree of layer-by-layer growth in low energy ion deposition of thin films

T. Huhtamäki, M.O. Jahma, I.T. Koponen

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Pages (from-to)55-60
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume264
Issue number1
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

Keywords

  • layer-by-layer growth
  • low energy ion deposition
  • modelling

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