A Pyrazolate-based Metalorganic Tantalum Precursor that exhibits High Thermal Stability and its use in the Atomic Layer Deposition of Ta2O5

Charles L. Dezelah, Monika K. Wiedmann, Kenichiro Mizohata, Ronald J. Baird, Lauri Niinistö, Charles H. Winter

    Research output: Contribution to journalArticleScientificpeer-review

    35 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)12370-12371
    JournalJournal of the American Chemical Society
    Volume129
    Issue number41
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Cite this