A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5

Charles H. Winter; Charles L. Dezelah IV; Monika Wiedmann; Kenichiro Mizohata; Ronald J. Baird; Lauri Niinistö

A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5

Charles H. Winter
, Charles L. Dezelah IV
, Monika Wiedmann
, Kenichiro Mizohata
, Ronald J. Baird
, Lauri Niinistö

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	ALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007
Publication status	Published - 2007
MoE publication type	A4 Conference publication

Cite this

@inproceedings{ccc944efccbf4231966a6ae487f73a10,

title = "A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5",

author = "Winter, \{Charles H.\} and \{Dezelah IV\}, \{Charles L.\} and Monika Wiedmann and Kenichiro Mizohata and Baird, \{Ronald J.\} and Lauri Niinist{\"o}",

year = "2007",

language = "English",

booktitle = "ALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007",

}

A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5. / Winter, Charles H.; Dezelah IV, Charles L.; Wiedmann, Monika et al.
ALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007. 2007.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5

AU - Winter, Charles H.

AU - Dezelah IV, Charles L.

AU - Wiedmann, Monika

AU - Mizohata, Kenichiro

AU - Baird, Ronald J.

AU - Niinistö, Lauri

PY - 2007

Y1 - 2007

M3 - Conference article in proceedings

BT - ALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007

ER -