A Pyrazolate-Based Metalorganic Tantalum Precursor Exhibiting High Thermal Stability and its Use in the Atomic Layer Deposition of Ta2O5

Charles H. Winter, Charles L. Dezelah IV, Monika Wiedmann, Kenichiro Mizohata, Ronald J. Baird, Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationALD 2007, 7th International Conference on Atomic Layer Deposition, Kona Kai Resort, San Diego, California 24-27 June 2007
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

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