A model for particle growth in arc deposited armophous carbon films

D. Drescher, J. Koskinen*, H. J. Scheibe, A. Mensch

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

31 Citations (Scopus)

Abstract

Arc evaporation processes are connected with the emission of small particles which are incorporated in the growing film on the substrate. SEM, AFM and optical microscopy indicate a size increase of such objects during film growth. Because of their cone-like shape we call them cone-like nodules. Using conventional measurement methods that can determine the structure, it is hard to explain the behaviour and properties of those nodules, as they do not provide clear information about their nature. Square resolved Raman measurements show a mixture of graphitic and diamond-like structures, that allows to conclude that the nodule consists of a graphitic particle originated at the cathode, covered by an amorphous carbon film. We propose a new model that describes the growth of cone-like nodules in the homogeneous carbon film very well. It is based on the dependence of the DLC film properties on the incidence angle of ions. The cone-like shape and the growth behaviour at perpendicular and grazed ion incidence was simulated using a simple computer program. A comparison of the simulated data and the SEM-images show a good qualitative and quantitative agreement.

Original languageEnglish
Pages (from-to)1375-1380
Number of pages6
JournalDiamond and Related Materials
Volume7
Issue number9
DOIs
Publication statusPublished - 9 Sep 1998
MoE publication typeA1 Journal article-refereed

Keywords

  • Diamond-like carbon
  • Nodular growth

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