A Micropower Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer

Matti Paavola, Mika Kämäräinen, Jere Järvinen, Mikko Saukoski, Mika Laiho, Kari Halonen

    Research output: Contribution to journalArticleScientificpeer-review

    39 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)2651-2665
    JournalIEEE Journal of Solid-State Circuits
    Volume42
    Issue number12
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Keywords

    • capacitive sensor interface circuit
    • low-power circuit
    • microelektromechanical system (MEMS)
    • switced-capacitor circuit
    • three-axis accelerometer

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