A Micropower Front-End for Three-Axis Capacitive Micro-accelerometers

Mikko Kämäräinen, Mikko Saukoski, Matti Paavola, Jere Järvinen, Mika Laiho, Kari Halonen

    Research output: Contribution to journalArticleScientificpeer-review

    7 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1
    JournalIEEE Transactions on Instrumentation and Measurement
    Publication statusPublished - 2008
    MoE publication typeA1 Journal article-refereed

    Keywords

    • electrostatic forces
    • self-balancing bridge
    • three-axis capacitive micro-accelerometer

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