A Micropower $\Delta \Sigma$-Based Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer

Matti Paavola, Mika Kämäräinen, Erkka Laulainen, Mikko Saukoski, Lauri Koskinen, Marko Kosunen, Kari Halonen

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)3193-3210
    JournalIEEE Journal of Solid-State Circuits
    Volume44
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed

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