A microfabricated nebulizer for liquid vaporization in chemical analysis

Sami Franssila, Seppo Marttila, Kai Kolari, Pekka Östman, Tapio Kotiaho, Risto Kostiainen, Reijo Lehtiniemi, Carl-Magnus Fager, Jorma Manninen

    Research output: Contribution to journalArticleScientificpeer-review

    29 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1251-1259
    JournalJournal of Microelectromechanical Systems
    Volume15
    Issue number5
    Publication statusPublished - 2006
    MoE publication typeA1 Journal article-refereed

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