A microfabricated nebulizer for liquid vaporization in chemical analysis

Sami Franssila; Seppo Marttila; Kai Kolari; Pekka Östman; Tapio Kotiaho; Risto Kostiainen; Reijo Lehtiniemi; Carl-Magnus Fager; Jorma Manninen

A microfabricated nebulizer for liquid vaporization in chemical analysis

Sami Franssila, Seppo Marttila, Kai Kolari, Pekka Östman, Tapio Kotiaho, Risto Kostiainen, Reijo Lehtiniemi, Carl-Magnus Fager, Jorma Manninen

Research output: Contribution to journal › Article › Scientific › peer-review

29 Citations (Scopus)

Original language	English
Pages (from-to)	1251-1259
Journal	Journal of Microelectromechanical Systems
Volume	15
Issue number	5
Publication status	Published - 2006
MoE publication type	A1 Journal article-refereed

Cite this

@article{a21ed04e07bc44aaa77d58f72c0dddd8,

title = "A microfabricated nebulizer for liquid vaporization in chemical analysis",

author = "Sami Franssila and Seppo Marttila and Kai Kolari and Pekka {\"O}stman and Tapio Kotiaho and Risto Kostiainen and Reijo Lehtiniemi and Carl-Magnus Fager and Jorma Manninen",

year = "2006",

language = "English",

volume = "15",

pages = "1251--1259",

journal = "Journal of Microelectromechanical Systems",

issn = "1057-7157",

publisher = "IEEE",

number = "5",

}

A microfabricated nebulizer for liquid vaporization in chemical analysis. / Franssila, Sami; Marttila, Seppo; Kolari, Kai; Östman, Pekka; Kotiaho, Tapio; Kostiainen, Risto; Lehtiniemi, Reijo; Fager, Carl-Magnus; Manninen, Jorma.

In: Journal of Microelectromechanical Systems, Vol. 15, No. 5, 2006, p. 1251-1259.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - A microfabricated nebulizer for liquid vaporization in chemical analysis

AU - Franssila, Sami

AU - Marttila, Seppo

AU - Kolari, Kai

AU - Östman, Pekka

AU - Kotiaho, Tapio

AU - Kostiainen, Risto

AU - Lehtiniemi, Reijo

AU - Fager, Carl-Magnus

AU - Manninen, Jorma

PY - 2006

Y1 - 2006

M3 - Article

VL - 15

SP - 1251

EP - 1259

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 5

ER -