A Method for Solving Arbitrary MEMS Perforation Problems with Rare Gas Effects

T. Veijola, P. Råback

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    8 Citations (Scopus)
    Original languageEnglish
    Title of host publicationNanotech 2005, Anaheim, USA, 7-13.5.2005
    Place of PublicationAnaheim, USA
    PublisherNano Science and Technology Institute
    Pages561-564
    ISBN (Print)0-9767985-2-2
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication

    Keywords

    • damping
    • gas damper
    • perforation
    • rare gas
    • Reynolds equation

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