Original language | English |
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Pages (from-to) | 1109-1116 |
Journal | Journal of Materials Chemistry |
Volume | 17 |
Issue number | 11 |
Publication status | Published - 2007 |
MoE publication type | A1 Journal article-refereed |
A low valent metalorganic precursor for the growth of tungsten nitride thin films by atomic layer deposition
Charles L. Dezelah, Oussama M. El-Kadri, Kaupo Kukli, Kai Arstila, Ronald J. Baird, Jun Lu, Lauri Niinistö, Charles H. Winter
Research output: Contribution to journal › Article › Scientific › peer-review
27
Citations
(Scopus)