A low valent metalorganic precursor for the growth of tungsten nitride thin films by atomic layer deposition

Charles L. Dezelah, Oussama M. El-Kadri, Kaupo Kukli, Kai Arstila, Ronald J. Baird, Jun Lu, Lauri Niinistö, Charles H. Winter

    Research output: Contribution to journalArticleScientificpeer-review

    24 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1109-1116
    JournalJournal of Materials Chemistry
    Issue number11
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Cite this