A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity

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A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity. / Yucetas, Mikail; Pulkkinen, Mika; Kalanti, Antti; Salomaa, Jarno; Aaltonen, Lasse; Halonen, Kari.

In: IEEE Journal of Solid-State Circuits, Vol. 47, No. 7, 2012, p. 1721-1730.

Research output: Contribution to journalArticle

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Yucetas, Mikail ; Pulkkinen, Mika ; Kalanti, Antti ; Salomaa, Jarno ; Aaltonen, Lasse ; Halonen, Kari. / A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity. In: IEEE Journal of Solid-State Circuits. 2012 ; Vol. 47, No. 7. pp. 1721-1730.

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@article{257461395ef049aab71710afd250f265,
title = "A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity",
keywords = "Accelerometers, damping, delta-sigma analog-digital conversion, force feedback, high Q, microelectromechanical systems, open-loop systems, ratiometric output, self-balancing bridge, Accelerometers, damping, delta-sigma analog-digital conversion, force feedback, high Q, microelectromechanical systems, open-loop systems, ratiometric output, self-balancing bridge, Accelerometers, damping, delta-sigma analog-digital conversion, force feedback, high Q, microelectromechanical systems, open-loop systems, ratiometric output, self-balancing bridge",
author = "Mikail Yucetas and Mika Pulkkinen and Antti Kalanti and Jarno Salomaa and Lasse Aaltonen and Kari Halonen",
note = "VK: T4030/Yucetas",
year = "2012",
doi = "10.1109/JSSC.2012.2191675",
language = "English",
volume = "47",
pages = "1721--1730",
journal = "IEEE Journal of Solid-State Circuits",
issn = "0018-9200",
publisher = "IEEE",
number = "7",

}

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TY - JOUR

T1 - A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity

AU - Yucetas, Mikail

AU - Pulkkinen, Mika

AU - Kalanti, Antti

AU - Salomaa, Jarno

AU - Aaltonen, Lasse

AU - Halonen, Kari

N1 - VK: T4030/Yucetas

PY - 2012

Y1 - 2012

KW - Accelerometers

KW - damping

KW - delta-sigma analog-digital conversion

KW - force feedback

KW - high Q

KW - microelectromechanical systems

KW - open-loop systems

KW - ratiometric output

KW - self-balancing bridge

KW - Accelerometers

KW - damping

KW - delta-sigma analog-digital conversion

KW - force feedback

KW - high Q

KW - microelectromechanical systems

KW - open-loop systems

KW - ratiometric output

KW - self-balancing bridge

KW - Accelerometers

KW - damping

KW - delta-sigma analog-digital conversion

KW - force feedback

KW - high Q

KW - microelectromechanical systems

KW - open-loop systems

KW - ratiometric output

KW - self-balancing bridge

UR - http://sscs.ieee.org/

U2 - 10.1109/JSSC.2012.2191675

DO - 10.1109/JSSC.2012.2191675

M3 - Article

VL - 47

SP - 1721

EP - 1730

JO - IEEE Journal of Solid-State Circuits

JF - IEEE Journal of Solid-State Circuits

SN - 0018-9200

IS - 7

ER -

ID: 734892