A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity

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Original languageEnglish
Pages (from-to)1721-1730
JournalIEEE Journal of Solid-State Circuits
Volume47
Issue number7
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

    Research areas

  • Accelerometers, damping, delta-sigma analog-digital conversion, force feedback, high Q, microelectromechanical systems, open-loop systems, ratiometric output, self-balancing bridge

ID: 734892